Microlithography and Metrology in Micromachining
SPIE PROCEEDINGS VOLUME 2640
MICROMACHINING AND MICROFABRICATION, 23-25 OCTOBER 1995
Editor(s): Michael T. Postek
Microlithography and Metrology in Micromachining
23 24 October 1995, Austin, Texas
Paperback
by Semiconductor Equipment and Materials Institute (Author), National Institute of Standards and Technology (U. S.) (Author), Society of Photo-Optical Instrumentation Engineers (Author), Michael T. Postek (Editor)
Product details
Publisher: Society of Photo Optical
Language: English
ISBN-10: 0819420069
ISBN-13: 978-0819420060
Exceptionally clean inside. Small spot on the edge of front cover.