Optical Microlithography Xvii
24-27 February, 2004, Santa Clara, California, USA
Proceedings of SPIE, Vol. 5377 in Three Volumes
by Bruce W. Smith (Editor)
Product details
Publisher: Society of Photo Optical
Publication date: July 23, 2004
Edition: New ed. is now available for $270
Language: English
Print length: 3 pages (that is, actually, 3 volumes)
ISBN-10: 0819452904
ISBN-13: 978-0819452900
Item Weight: 10.36 pounds