Hard to find original publication "Integrated Circuit Metrology, Inspection, and Process Control IV"
This publication is Volume 1261 of the SPIE proceedings and was edited by William H. Arnold.
It documents the proceedings of a conference that took place on March 5-6, 1990, in San Jose, California.
ISBN-10: 0819403083
ISBN-13: 978-0819403087
Excellent condition for the age. Handwriting on front cover (see image).