Advances in Resist Technology and Processing XXI
23-24 February 2004, Santa Clara, California, USA
Part One and Part Two of Two Parts
SPIE Proceedings Volume 5376
John L. Sturtevant, Ed.
Product details
Publisher: Society of Photo Optical
Publication date: January 1, 2004
Edition: New ed. is available for $246
Language: English
Print length: 2 volumes, app. 1,800 pages (total)
ISBN-10: 0819452890
ISBN-13: 978-0819452894
Item Weight: 6.83 pounds (total)
Condition
Part One: Exceptionally preserved and clean inside-out.
Part Two: Excellent condition. Clean inside and minor signs of wear on the lower edge.